Gigalam panel filters are combination products specially developed for mini-environment and process tool applications. An ULPA filter using standard glass media, low boron media or PTFE is combined with single or multiple layers of Gigapleat media.
Sizes are custom made to suit specific pieces of process equipment. The compact form of Camfil Farr Gigalam filters means that often they may be installed in the same space as the original particle filter.
The Camfil Farr Gigalam features:
- Extremely small form factor - often the same as for particle filtration only.
- Choice of standard, low boron or PTFE particle media.
- Choice of different Gigapleat media.
- Low pressure drop.
- High media cleanliness.
SEMATECH recommends the use of e-PTFE or low boron ULPA filters in mini-environment equipment. Camfil Farr's Gigalam can be manufactured with an overall height less than 4". Customized solutions are also available.